Sub-micron NUV |
 |
   |
|
Sub-micron DUV |
|
  |
|
Thick resist |
|
     |
|
Ultra-thick resist |
|
  |
|
Patterned Sapphire Substrate (PSS) |
|
      |
|
SU8 |
|
    |
|
Nanoimprint Lithography (NIL) |
|
          |
|